Xitronix' Photo-Modulation Reflectance (PMR) systems provide process control for advanced dopant activation and strained silicon processes. The Xitronix platforms fully support industry automation requirements and meet SEMI standards.


Product overview

  • Process control for Laser Anneal
  • Precise, non-destructive characterization of carrier mobility
  • Precise, non-destructive characterization of dopant activation in Ultra-Shallow Junctions
  • Precise, non-destructive measurement of strain in ultra-thin strained Si layers
  • On-product measurement capability on SIMS boxes, test structures and patterned features
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