The Xitronix XP700 System is a high throughput, fully automated 300 mm measurement system designed to meet the process control requirements of advanced semiconductor manufacturers. The XP700 incorporates the industry proven Active Carrier Concentration measurement capabilities of the Xitronix PMR technology in a fully automated platform suited for real-time process control of advanced semiconductor manufacturing processes. Features include a GUI which allows users to define recipes for R&D and process control of dopant activation on virtually any active Si structure. Precise tool matching and repeatability are achieved through the use of auto-balanced detection and robust calibration protocols. Xitronix's fully automated XP700 System provides true process control capability for semiconductor electronic properties in an advanced manufacturing environment.